Laser micro-processing of ceramic glasses by ultra-short laser pulses

Senn, Florian; Holtz, Ronald; Gross-Barsnick, Sonja M.; Reisgen, Uwe

SPIE (2019) [Contribution to a book, Contribution to a conference proceedings]

[24th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing, LAMOM, 2019-02-02 - 2019-02-07, San Francisco, CA, USA]
Page(s): 109050W