Laser micro-processing of ceramic glasses by ultra-short laser pulses

SPIE (2019) [Contribution to a book, Contribution to a conference proceedings]

[24th Conference on Laser Applications in Microelectronic and Optoelectronic Manufacturing, LAMOM, 2019-02-02 - 2019-02-07, San Francisco, CA, USA]
Page(s): 109050W

Authors

Authors

Senn, Florian
Holtz, Ronald
Gross-Barsnick, Sonja M.
Reisgen, Uwe Kaspar

Identifier

Sources