Assembly of hybrid micro-systems : the SFB 440 handling and joining techniques for small and medium series production
Dilthey, Ulrich (Author); Brandenburg, Annette (Author); Smolka, Gregor (Author)
Berlin [u.a.] / Springer (2004) [Journal Article]
Microsystem technologies
Volume: 10
Issue: 3
Page(s): 247-251
Identifier
- DOI: 10.1007/s00542-003-0366-z
- REPORT NUMBER: RWTH-CONV-031202