Assembly of hybrid micro-systems : the SFB 440 handling and joining techniques for small and medium series production

Dilthey, Ulrich (Author); Brandenburg, Annette (Author); Smolka, Gregor (Author)

Berlin [u.a.] / Springer (2004) [Journal Article]

Microsystem technologies
Volume: 10
Issue: 3
Page(s): 247-251

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